CMOS-MEMS von Oliver Brand/Gary K Fedder/Henry Baltes et al

InhaltsangabePREFACE FABRICATION TECHNOLOGY MATERIAL CHARACTERIZATION MONOLITHICALLY INTEGRATED INERTIAL SENSORS CMOS?MEMS ACOUSTIC DEVICES RF CMOS MEMS CMOSBASED PRESSURE SENSORS CMOSBASED CHEMICAL SENSORS BIOMETRIC CAPACITIVE CMOS FINGERPRINT SENSOR SYSTEMS CMOSBASED BIOCHEMICAL SENSING SYSTEMS CMOSBASED THERMAL SENSORS CIRCUIT AND SYSTEM INTEGRATION SUBJECT INDEX

Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging. Gary K. Fedder is Professor of Electrical and Computer Engineering, Professor of The Robotics Institute and the Director of the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University, Pittsburgh, USA. He received the BSc and MSc degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his PhD in 1994 from the University of California, Berkeley. His research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe-based nanofabrication technologies.